Microelectronics Research Center

Resource / Instrument Live Usage as of Fri 6-19-2026 3:36 PM

The following users are currently either checked into a room or have equipment in use:
Select Status Resource / Instrument Time (h:mm)🛈 Current User Usage Type Location
XRD Rigaku #2 (EQU-MET-XRD-02) 0:12 Amberly Ricks (FBS021860)* In-Use MER 1.802
Acid Hood - C11 (EQU-WET-DHOD-11) MER 1.756
Acid Hood - C14 (EQU-WET-DHOD-14) MER 1.756
Acid Hood - C16 (EQU-WET-DHOD-16) MER 1.756
Acid Hood - E02 (EQU-WET-AHOD-02) MER 1.748
Acid Hood - F06 (EQU-WET-AHOD-06) MER 1.750
Acid Hood - G12 (EQU-WET-AHOD-12) MER 1.736
Acid Hood - G14 (EQU-WET-AHOD-13) MER 1.736
Acid Hood - H14 (EQU-WET-AHOD-14) MER 1.738
Acid Hood - H15 (EQU-WET-AHOD-15) MER 1.738
Acid Hood - J19 (EQU-WET-AHOD-19) MER 1.728
AET Thermal RX6 (EQU-HEAT-RTP-00) MER 1.756A
AFM #1 (EQU-MET-AFM-01) MER 1.730
AFM #2 (EQU-MET-AFM-02) MER 1.730
AJA Ion Mill (EQU-ETCH-IONM-00) MER 1.756A
Angstrom UHV Sputter (EQU-DEP-SPUT-01) MER 1.736
Anneal (Doped) (EQU-HEAT-ANL-01) MER 1.756
Anneal (Field Oxide) (EQU-HEAT-ANL-02) MER 1.756
Anneal (Gate Oxide) (EQU-HEAT-ANL-03) MER 1.756
Anneal (Undoped) (EQU-HEAT-ANL-04) MER 1.756
Ball Bonder (EQU-PAC-WBND-03) MER 2.820
Ball Bonder K&S (EQU-PAC-WBND-01) MER 2.820
Blue Vacuum Oven (EQU-HEAT-VOVN-00) MER 1.756A
Bruker Dektak (EQU-MET-PROF-00) MER 1.748
Cascade #1 (EQU-CHAR-PROB-02) MER 2.816
Cascade #2 (EQU-CHAR-PROB-04) MER 2.818
CHA #1 (EQU-DEP-CHEV-01) MER 1.748
CHA #2 (EQU-DEP-CHEV-02) MER 1.748
CHA #3 (EQU-DEP-CHEV-03) MER 1.748
Corial210 Etcher - C (EQU-ETCH-CRIE-02) MER 1.750
Corial210 Etcher - F (EQU-ETCH-CRIE-03) MER 1.738
Corial360 Etcher - F (EQU-ETCH-CRIE-01) MER 1.750
Critical Point Dryer (EQU-ETCH-CPDR-00) MER 1.748
Dicing Saw 7900 DUO (EQU-PAC-DICE-00) MER 2.406
Diff Doping POCl3 (EQU-HEAT-DIFF-00) MER 1.756
Evatec - AlScN (EQU-DEP-SPUT-05) MER 1.756A
EVG Mask Aligner (EQU-LITH-MASK-01) MER 1.728
Fiji ALD (EQU-DEP-ALD-02) MER 1.756
Filmetrics F54 (EQU-MET-F54-00) MER 1.730
FormFactor ASP200 (EQU-CHAR-PROB-01) MER 2.816
Furnace (Sintering) (EQU-HEAT-FURN-00) MER 1.736
HMDS Oven (EQU-LITH-HMDS-00) MER 1.720
Hood - Fab Entry (EQU-WET-ENT-00) MER 1.702
Jandel RM3000 (EQU-MET-4PNT-00) MER 1.730
JEOL 8100 (EQU-LITH-EBLW-03) MER 1.700A
Karl SUSS MA8 (EQU-LITH-MA8-00) MER 1.720
Karl SUSS MJB4 (EQU-LITH-MASK-02) MER 1.728
Keyence Microscope (EQU-MET-VHX-00) MER 1.730
KJL - Metals/Dielec (EQU-DEP-SPUT-04) MER 1.756A
KJL - Sputter DC/RF (EQU-DEP-SPUT-03) MER 1.736
KJL E-Beam (EQU-DEP-EBEV-01) MER 1.736
KOH Hood - H16 (EQU-WET-KHOD-16) MER 1.738
KOH Hood - H18 (EQU-WET-KHOD-18) MER 1.738
Lakeshore FastHall (EQU-CHAR-HALL-00) MER 2.820
Lakeshore FWPX (EQU-CHAR-PROB-03) MER 2.816
Laser Microscope (EQU-MET-LMSP-00) MER 1.730
LPCVD a-Si (EQU-HEAT-LPCV-01) MER 1.756
LPCVD Low Temp Oxide (EQU-HEAT-LPCV-02) MER 1.756
LPCVD Nitride (EQU-HEAT-LPCV-03) MER 1.756
MLA150 (EQU-LITH-MLA-00) MER 1.728
Nanospec AFT (EQU-MET-SPEC-00) MER 1.730
Nickel Plating #1 (EQU-DEP-NIPL-00) MER 2.406
Nickel Plating #2 (EQU-DEP-NIPL-01) MER 2.406
Nickel Plating #3 (EQU-DEP-NIPL-02) MER 2.406
Optical Microscope 1 (EQU-MET-OMSC-01) MER 1.748
Optical Microscope 2 (EQU-MET-OMSC-02) MER 1.748
Oxford 100 ICP (EQU-ETCH-OXET-02) MER 1.750
Oxford 80 RIE (EQU-ETCH-OXET-01) MER 1.750
Oxford ALD (ASP) (EQU-DEP-ALD-03) MER 1.756A
Oxford DSE (EQU-ETCH-DSE-02) MER 1.738
Parylene Coater (EQU-DEP-PARY-00) MER 1.720
PECVD 770 a-Si Doped (EQU-DEP-PECV-01) MER 1.704A
PlasmaPro 100 (EQU-DEP-PECV-03) MER 1.750
Plasma-Therm 790 #1 (EQU-DEP-PECV-02) MER 1.750
Plasma-Therm 790 #2 (EQU-ETCH-PTRI-02) MER 1.738
Raith 150 Two (EQU-LITH-EBLW-02) MER 1.720A
Raith eLINE (EQU-LITH-EBLW-01) MER 1.730A
Raman (EQU-MET-RAM-00) MER 2.820
Rapid Thermal Anneal (EQU-HEAT-RTA-00) MER 1.748
Savannah ALD (EQU-DEP-ALD-01) MER 1.704A
SEM Sample Sputter (EQU-MET-SCOA-00) MER 1.730A
Solvent Hood - E05 (EQU-WET-SHOD-05) MER 1.748
Solvent Hood - F03 (EQU-WET-SHOD-03) MER 1.750
Solvent Hood - G08 (EQU-WET-SHOD-08) MER 1.736
Solvent Hood - G11 (EQU-WET-SHOD-11) MER 1.736
Solvent Hood - H03 (EQU-WET-SHOD-00) MER 1.738
Solvent Hood - J24 (EQU-WET-SHOD-24) MER 1.728
Spinner - J21 (EQU-WET-SPIN-21) MER 1.728
Spinner - Brewer (EQU-WET-SPIN-00) MER 1.720
Spinner - J23 (EQU-WET-SPIN-23) MER 1.728
Spinner - L10 (EQU-WET-SPIN-10) MER 1.720
Takachi ICP ALE - Cl (EQU-ETCH-TALE-00) MER 1.738
TePla Asher (EQU-LITH-ASHR-00) MER 1.720
Tytan 3800 Furnaces (EQU-HEAT-TYTN-00) MER 1.756
UNIVEX450 Al/Ti (EQU-DEP-SPUT-02) MER 1.736
UV Ozone Cleaner (EQU-HEAT-UVOZ-00) MER 1.756A
Versaline DSE (EQU-ETCH-DSE-01) MER 1.738
Wafer Bonder (EQU-PAC-WBON-00) MER 1.728
Wafer Press (EQU-LITH-WPRS-00) MER 1.728
Wedge Bonder (EQU-PAC-WBND-02) MER 2.820
Woollam IR-VASE (EQU-MET-ELPS-03) MER 1.802
Woollam M-2000 DI (EQU-MET-ELPS-01) MER 1.756
Woollam RC2 (EQU-MET-ELPS-02) MER 1.730
Xactix XF2 Etcher (EQU-ETCH-XACT-00) MER 1.748
XRD Rigaku #1 (EQU-MET-XRD-01) MER 1.802
ZEISS Gemini 460 (EQU-MET-SEM-00) MER 1.730A
Zeiss Neon 40 (EQU-MET-SEM-01) MER 1.722
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